2K & 6K Series Low Flow Mass Flow Sensors
MEMS thermal mass flow sensors for low flow rates from 20 to 10000 SCCM.
Key specifications
| Flow range | 20 to 10000 SCCM |
|---|---|
| Sensing principle | MEMS thermal (heater with upstream and downstream thermopiles) |
Overview
The 2K & 6K Series uses advanced chip design and MEMS technology for enhanced response time and low power consumption. A variety of port styles provides greater application flexibility.
How MEMS thermal flow sensing works
A heater sits between an upstream and a downstream thermopile. With no flow, the temperature profile around the heater is symmetric. Flow shifts the profile downstream, and the difference between the two thermopiles gives the mass flow rate.