Flow Sensors
MEMS Thermal Flow
20 SCCM–1,000 SLM
Fast Response
How MEMS thermal flow sensing works
A heater sits between an upstream and a downstream thermopile. With no flow, the temperature profile around the heater is symmetric. Flow shifts the profile downstream, and the difference between the two thermopiles gives the mass flow rate.
Series
2K & 6K Series Low Flow Mass Flow Sensors
Flow range: 20 to 10000 SCCM
Sensing principle: MEMS thermal (heater with upstream and downstream thermopiles)
5K Series Medium Flow Mass Flow Sensors
Flow range: 5 to 50 SLM
Sensing principle: MEMS thermal (heater with upstream and downstream thermopiles)
4K Series High Flow Mass Flow Sensors
Flow range: 40 to 1000 SLM
Sensing principle: MEMS thermal (heater with upstream and downstream thermopiles)